2INCH 4INCH NPSS/FSS AlN template on sapphire EPI-wafer AlN-On-Sapphire wafer
|Material||AlN On Wafer||Method||HVPE|
2inch AlN template on sapphire or sic substrates, HVPE Gallium Nitride wafer,AlN substrates on GaN
2INCH AlN template on sapphire EPI-wafer AlN-On-Sapphire wafer
Forbidden band width (light emitting and absorption) cover the ultraviolet, visible light and infrared.
AlN template is used for development of HEMT structures, resonant tunneling diodes and
|2” AlN Templates|
|Substrate||Sapphire, SiC, GaN|
|Orientation||C-axis(0001) ± 1°|
|Dislocation Density||XRD FWHM of (0002) < 200 arcsec.|
|XRD FWHM of (10-12) < 1000 arcsec|
|Useable Surface Area||> 80%|
|Package||Packaged in a class 100 clean room environment, in cassettes of 25pcs or single wafer containers, under a nitrogen atmosphere.|
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