Brand Name: | zmkj |
Model Number: | high purity un-doped 4h-semi |
MOQ: | 3PCS |
Price: | by required |
Delivery Time: | 10-20days |
High purity un-doped 4inch 4H-Semi silicon carbide sic wafers for optical lens or device
Silicon Carbide SiC crystal substrate wafer carborundum
SILICON CARBIDE MATERIAL PROPERTIES
Product Name: | Silicon carbide (SiC) crystal substrate | ||||||||||||||||||||||||
Product Description: | 2-6inch | ||||||||||||||||||||||||
Technical parameters: |
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Specifications: | 6H N-type 4H N-type semi-insulating dia2 "x0.33mm, dia2" x0.43mm,dia2''x1mmt, 10x10mm, 10x5mm Single throw or double throw, Ra <10A | ||||||||||||||||||||||||
Standard Packaging: | 1000 clean room, 100 clean bag or single box packaging |
2. substrates size of standard
4 inch diameter Silicon Carbide (SiC) Substrate Specification |
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Grade | Zero MPD Grade | Production Grade | Research Grade | Dummy Grade | |||||
Diameter | 76.2 mm±0.3 mm or 100±0.5mm; | ||||||||
Thickness | 500±25um | ||||||||
Wafer Orientation | 0° off (0001)axis | ||||||||
Micropipe Density | ≤1 cm-2 | ≤5 cm-2 | ≤15 cm-2 | ≤50 cm-2 | |||||
Resistivity | 4H-N | 0.015~0.028 Ω•cm | |||||||
6H-N | 0.02~0.1 Ω•cm | ||||||||
4/6H-SI | ≥1E7 Ω·cm | ||||||||
Primary Flat and length | {10-10}±5.0° ,32.5 mm±2.0 mm | ||||||||
Secondary Flat Length | 18.0mm±2.0 mm | ||||||||
Secondary Flat Orientation | Silicon face up: 90° CW. from Prime flat ±5.0° | ||||||||
Edge exclusion | 3 mm | ||||||||
TTV/Bow /Warp | ≤15μm /≤25μm /≤40μm | ||||||||
Roughness | Polish Ra≤1 nm ,CMP Ra≤0.5 nm | ||||||||
Cracks by high intensity light | None | 1 allowed, ≤2 mm | Cumulative length ≤ 10mm, single length≤2mm | ||||||
Hex Plates by high intensity light | Cumulative area ≤1% | Cumulative area ≤1% | Cumulative area ≤3% | ||||||
Polytype Areas by high intensity light | None | Cumulative area ≤2% | Cumulative area ≤5% | ||||||
Sic wafer & ingots 2-6inch and other customized size also can be provided.
3.Products detail display
Delivery & Package