Quartz boats Fused Silica Boat SiO₂≥99.99% Surface Roughness Ra≤0.1μm Wafer Carrier
Quartz glass boats are specialized vessels manufactured from high-purity silicon dioxide (SiO₂) through high-temperature melting processes. Renowned for their exceptional thermal resistance, chemical stability, and optical transparency, they serve as irreplaceable components in semiconductor fabrication, laboratory R&D, medical devices, and high-temperature industrial applications. Engineered to balance precision structures with material performance limits, these boats operate stably in extreme temperatures (-270℃ to 1450℃) while resisting strong acids, alkalis, and electromagnetic interference. They are widely used for high-temperature process carriers, optical component supports, and precision experiment platforms. With the rise of third-generation semiconductors and new energy industries, demand for quartz glass boats in chip manufacturing, laser packaging, and high-temperature reaction systems continues to grow, solidifying their role as critical infrastructure in advanced labs and production lines.
Specification for quartz boats
| Chemical Composition: |
SiO₂ 99.9%; 99.98% |
| Density: |
2.2 (g/cm³) |
| Mohs Hardness: |
6.6 |
| Melting Point: |
1732 ℃ |
| Operating Temperature: |
1100 ℃ |
| Max Short-Term Temperature: |
1450 ℃ |
| Acid Resistance: |
30× ceramics / 150× stainless steel |
| Visible Light Transmittance: |
>93% |
| UV Transmittance: |
80% |
| Electrical Resistivity: |
10,000× conventional glass |
| Annealing Point: |
1215 ℃ |
| Softening Point: |
1730 ℃ |
Material types of quartz boats
| Type |
Characteristics |
Applications |
| Transparent Quartz Boat |
JGS1 grade (UV-grade), OH content <5ppm, >90% transmittance @185nm |
Lithography, epitaxy (optical-sensitive processes) |
| Opaque Quartz Boat |
Milky appearance, porosity <0.3%, 50% improved thermal shock resistance |
Diffusion, annealing (high-temperature processes) |
| Synthetic Quartz Boat |
CVD-processed, metal impurities <0.1ppm, superior plasma corrosion resistance |
Etching, ion implantation (dry processes) |
| Doped Quartz Boat |
Ti/Ce-doped, crystallization resistance up to 1300℃ |
Single-crystal silicon growth, MOCVD (ultra-high-temp environments) |
Primary applications of quartz boats
| Industry |
Typical Use Cases |
Key Requirements |
| Semiconductor |
Wafer diffusion, LPCVD process carriers |
High-temp deformation <0.1mm/300mm |
| Photovoltaics |
PERC cell P-diffusion, TOPCon tunnel oxide layer |
POCl₃ corrosion resistance ≥200 cycles |
| LED Epitaxy |
MOCVD reaction chamber wafer holders |
Surface roughness ≤0.05μm |
| Precision Annealing |
Magnetic materials, specialty alloy heat treatment |
Metal vapor erosion resistance |
| Research Equipment |
Synchrotron beamline sample holders, MBE substrates |
Ultra-high vacuum compatibility (<10⁻⁸Pa) |
Key advantages of quartz boats
1. Extreme Thermal Performance
· Long-term operating temperature: 1100℃ (short-term up to 1450℃)
· 1000 thermal cycles (-196℃↔1200℃) without cracking
2. Chemical Stability
· Resists all strong acids except HF (98% H₂SO₄, 37% HCl, etc.)
· 3× better alkali resistance than conventional ceramics
3. Physical Properties
· Thermal conductivity: 1.4 W/(m·K) (prevents heat accumulation)
· Dielectric strength: 40 kV/cm (at 20℃)
4. Cleanliness Control
· Produced in Class 10 cleanrooms
· Surface particles ≤5 counts/cm² (≥0.3μm)
ZMSH's Services
ZMSH specializes in customized quartz glass boats for semiconductors, photovoltaics, and optoelectronics. Equipped with quartz research institute and CNAS-certified lab, we utilize laser 3D inspection systems to achieve ±0.01mm machining accuracy and atomic-level surface treatment. Our engineering team offers end-to-end support from structural design, thermal simulation to process validation, with expertise in ultra-high-temperature (1600℃) and extreme thermal shock (ΔT≥1200℃) applications. Through our Class 10 cleanroom and smart production line, we accommodate R&D prototypes.
Related product recommendations: Quartz capillary
Q&A
Your message must be between 20-3,000 characters!
