High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

Product Description:

Our SiC end effectors are designed for ultra-clean wafer handling in semiconductor manufacturing environments. Manufactured using high-purity silicon carbide, these forks provide exceptional thermal resistance, chemical stability, and mechanical strength—making them ideal for use in harsh process chambers such as etching, deposition, and high-temperature transport systems.

The dense, fine-grain SiC body ensures low particle generation, excellent dimensional stability, and compatibility with 200mm to 300mm wafers. Custom designs are available for specific robotic arms and wafer carriers.

Key Features:

• Material: High-purity Silicon Carbide (SiC)

• Excellent thermal resistance (up to 1600°C)

• Superior chemical and plasma corrosion resistance

• High mechanical strength and rigidity

• Low particle generation for cleanroom use

• Available for 4", 6", 8", and 12" wafer handling

• Custom shapes and slots for robotic compatibility

Product Specifications:

Keywords / Tags:
 

#SiCEndEffector #WaferHandling #SiCFork #SemiconductorEquipment #WaferTransfer #HighPuritySiC #SiCWaferCarrier #SemiconductorAutomation #VacuumCompatible #SiCComponent #EtchingToolPart #RoboticWaferHandling