products details

Home Products

High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

Brand Name:	ZMSH
MOQ:	5
Price:	100
Delivery Time:	3-4 week
Payment Terms:	T/T

Detail Information

Product Description

Detail Information

Place of Origin:

China

Certification:

rohs

Surface Resistance:

10⁴~10⁹Ω

Size:

Customizable (for 4–12 Inch Wafers)

Purity:

99.9%

Density:

D=8.91（g/cm3）

Diameter:

25-500 Um

Application:

Package Test, Chip Sorting

Mechanical Strength:

Flexural Strength > 400 MPa

Resistivity:

0.1~60ohm.cm

Thermal Resistance:

1600 ℃

Chemical Resistance:

Resistant To Acids, Bases, And Plasma

Packaging Details:

Foam Cushion + Carton box

Supply Ability:

1000per month

Highlight:

Semiconductor Processing SiC End Effector

Wafer Handling SiC End Effector

Corrosion Resistant SiC End Effector

Product Description

Product Description:

Our SiC end effectors are designed for ultra-clean wafer handling in semiconductor manufacturing environments. Manufactured using high-purity silicon carbide, these forks provide exceptional thermal resistance, chemical stability, and mechanical strength—making them ideal for use in harsh process chambers such as etching, deposition, and high-temperature transport systems.

The dense, fine-grain SiC body ensures low particle generation, excellent dimensional stability, and compatibility with 200mm to 300mm wafers. Custom designs are available for specific robotic arms and wafer carriers.

Key Features:

Material: High-purity Silicon Carbide (SiC)

Excellent thermal resistance (up to 1600°C)

Superior chemical and plasma corrosion resistance

High mechanical strength and rigidity

Low particle generation for cleanroom use

Available for 4", 6", 8", and 12" wafer handling

Custom shapes and slots for robotic compatibility

Product Specifications:

Parameter	Specification
Material	High-purity SiC (≥99%)
Size	Customizable (for 4–12 inch wafers)
Surface Finish	Polished or matte per requirement
Thermal Resistance	Up to 1600°C
Chemical Resistance	Resistant to acids, bases, and plasma
Mechanical Strength	Flexural strength > 400 MPa
Cleanroom Grade	Suitable for Class 1–100

High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing 0

Keywords / Tags:

#SiCEndEffector #WaferHandling #SiCFork #SemiconductorEquipment #WaferTransfer #HighPuritySiC #SiCWaferCarrier #SemiconductorAutomation #VacuumCompatible #SiCComponent #EtchingToolPart #RoboticWaferHandling

Tags:

Gallium Nitride Wafer

Sapphire Wafer

SiC Substrate

Sapphire Optical Windows

IC Silicon Wafer

Synthetic Sapphire Rod

Fused Quartz Plate

Sapphire Parts

Synthetic Gemstone

Semiconductor Equipment

LiNbO3 Wafer

GaAs Wafer

Indium Phosphide Wafer

Ceramic Substrate

Lab Wrapper