1 Inch Single Wafer Cassette for ESD-Safe Wafer Storage
The 1-inch wafer cassette is a specialized container designed for storing, transporting, and automated handling of 1-inch (25.4mm) wafers in semiconductor manufacturing, optoelectronic devices, and microelectronics R&D. Manufactured from high-purity polymers (such as PEEK or PVDF) or antistatic materials, it ensures wafer protection against contamination, electrostatic damage, and physical impact in cleanroom environments. Compliant with SEMI standards, the cassette is suitable for automated wafer transfer systems in processes including MOCVD, PECVD, lithography, and etching.
1 Inch Wafer Cassette Key Features
1. Ultra-Clean Performance:
• 1 Inch Wafer Cassette certified for Class 100 cleanroom with ultra-low particle generation (<5 particles/ft³ for >0.1μm)
• Smooth surface finish prevents wafer scratching
2. ESD Protection:
• Carbon fiber reinforced or antistatic coating with surface resistivity of 10⁶-10⁹Ω/sq
• 1 Inch Wafer Cassette effectively prevents particle attraction and electrostatic discharge damage
3. Mechanical Reliability:
• High temperature resistance (up to 150°C) and chemical resistance (against acids, alkalis, and organic solvents)
• 1 Inch Wafer Cassette vibration-tested design compliant for secure transportation
4. Automation Compatibility:
• 1 Inch Wafer Cassette standardized interfaces (SMIF/FOUP compatible) for robotic handling
• Compatible with major semiconductor equipment (ASML, Applied Materials, etc.)
5. Precision Wafer Protection:
• 1 Inch Wafer Cassette slot pitch accuracy ±0.1mm with wafer positioning error ≤0.05mm
• Optional RFID tag slots for wafer traceability
1 Inch Wafer Cassette Primary Applications
①Semiconductor Manufacturing:
• Front-end processing (lithography, ion implantation) for GaN/SiC wafers
• Handling of traditional semiconductors (Si, GaAs, InP)
• Power device (MOSFET/IGBT) and RF device (GaN) production
②Optoelectronics:
• LED/MicroLED chip and laser (VCSEL/EEL) wafer handling
• UV/IR/visible LED epitaxial processing
③R&D Applications:
• 1 Inch Wafer Cassette with small wafer experiments in academic and research institutions
• Novel optoelectronic materials research (quantum dots, perovskites)
④MEMS Fabrication:
• Protection for sensor wafers (accelerometers, gyroscopes, pressure sensors)
• Bio-MEMS and optical MEMS device manufacturing
⑤Advanced Packaging:
• 1 Inch Wafer Cassette is temporary storage for wafer-level packaging (WLP) and 3D IC integration
Related product recommendations
ZMSH provide 1-to-6-inch single wafer cassettes, we provide professional wafer storage and transfer solutions for semiconductor manufacturing. The 1-inch suits lab R&D for GaAs materials, 2-inch for LED/MEMS processing, 3-inch for SiC/GaN power devices, 4-inch for mainstream silicon semiconductors, and 6-inch supports advanced IC production. All sizes meet SEMI standards for reliable transfer in cleanroom environments.
1 Inch Wafer Cassette FAQ
1. Q: What is a 1-inch wafer cassette used for?
A: It's primarily used for handling and storing 1-inch semiconductor wafers in research labs and small-scale production of optoelectronic devices.
2. Q: What materials are 1-inch wafer cassettes made of?
A: They're typically made of high-purity polymers like PEEK or PVDF with anti-static properties for cleanroom compatibility.
Tags: #1 Inch Single Wafer Cassette, #ESD-Safe, #Wafer Storage
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