SiC Ceramic Tray for LED Wafer Epitaxy and ICP Etching Processes

SiC Ceramic Tray for LED Wafer Epitaxy and ICP Etching Processes

Product Overview

The SiC Ceramic Tray is a high-performance solution designed to support semiconductor wafers and other materials in high-temperature and chemically aggressive environments. Renowned for its exceptional corrosion resistance, superior thermal stability, and mechanical strength, the SiC tray delivers consistent performance and reliable support for critical processes such as epitaxy, diffusion, oxidation, and high-temperature sintering.

SiC trays are essential in industries such as semiconductor manufacturing, advanced ceramics, chemical processing, electronics, optics, aerospace, automotive, and medical device fabrication.

Specifications

Key Features of SiC Ceramic Trays

1. • High Thermal Stability: Retains performance at extreme temperatures, making them ideal for high-temperature processes like sintering and semiconductor fabrication.

   • Exceptional Mechanical Strength: High hardness and excellent load-bearing capacity prevent deformation or cracking under stress.

   • Superior Chemical Resistance: Resists strong acids, alkalis, and other corrosive chemicals, ensuring reliability in harsh environments.

   • Excellent Thermal Conductivity: Efficient heat transfer allows for uniform temperature distribution, optimizing process control.

   • Low Thermal Expansion: Maintains dimensional stability during thermal cycling, reducing the risk of warping or distortion.

   • Electrical Insulation: Provides dependable insulation, making it suitable for electronic applications.

   • CVD Coating Options: Available to enhance wear resistance and provide additional protection against thermal shock.

   • Customizable Sizes & Shapes: Tailored to meet specific process requirements for different industrial applications.

Applications of SiC Ceramic Trays

• • Semiconductor Manufacturing: Essential for supporting LED and wafer chips during processes like epitaxy, diffusion, and oxidation.

  • High-Temperature Sintering: Offers stable support for ceramics and metals in sintering processes at elevated temperatures.

  • Chemical Processing: Safe handling of aggressive chemicals in both industrial and laboratory environments.

  • Electronics & Optics Production: Used for substrates and optical components that require precise thermal control.

  • Aerospace & Automotive: Lightweight yet strong trays ideal for components requiring superior thermal management and corrosion resistance.

  • Medical Device Manufacturing: Perfect for trays that need to be both chemical-resistant and sterilizable.

  • Battery Production & Solar Industry: Supports high-temperature processes critical for lithium-ion batteries and photovoltaic cells.

  • Laboratory & R&D: Suitable for experiments involving high heat or exposure to corrosive materials.

  • Powder Metallurgy & Glass/Ceramic Industry: Ensures uniform heating and reliable process control in high-temperature manufacturing.

Advantages of SiC Ceramic Tray

• • High Purity & Chemical Inertness: Minimizes the risk of contamination, ideal for precision applications.

  • Stability Under Extreme Conditions: Maintains mechanical strength and integrity even in harsh environments.

  • Exceptional Wear Resistance: Designed for long-term use, offering durability and reducing the need for frequent replacements.

  • Lightweight & Durable: Easy to handle without compromising on strength and performance.

  • Versatile for Multiple Industries: Adaptable to a wide range of applications, from high-tech manufacturing to research and development.

Summary

ZMSH SiC Ceramic Trays deliver a combination of thermal, chemical, and mechanical excellence, making them an indispensable component in advanced manufacturing processes. Their high precision, corrosion resistance, and thermal stability ensure reliability in industries such as semiconductor production, aerospace, medical devices, and more. These trays are engineered for high-performance applications, providing lasting solutions in demanding environments.

Related Products