| Brand Name: | ZMSH |
| Model Number: | Microfluidic chip glass substrate |
| Delivery Time: | in 30 days |
| Payment Terms: | T/T |
| Specification | Value |
| Glass Thickness | <1.1 mm |
| Wafer Sizes | All standard up to 200 mm |
| Minimum Microhole Diameter | 10 µm |
| Identical Hole Diameter | 99% |
| Positional Accuracy | ±3 µm |
| Chipping | None |
| Super Smooth Sidewalls | RA < 0.08 µm |
| Hole Types | Through Via (True circle or Ellipse), Blind Via (True circle or Ellipse) |
| Hole Shape | Hourglass |
| Option | Singulation from hole-processed large-sized glass |