Product Details
Place of Origin: CHINA
Brand Name: ZMSH
Certification: rohs
Model Number: SiC 6H-P
Payment & Shipping Terms
Price: by case
Payment Terms: T/T
Supply Ability: 1000pc/month
Polytype: |
6H-P |
Mohs Hardness: |
≈9.2 |
Density: |
3.0 G/cm3 |
Resistivity: |
≤0.1 Ω.cm |
Surface Orientation: |
On Axis 0° |
Roughness: |
Polish Ra≤1 Nm |
Packaging: |
Multi-wafer Cassette Or Single Wafer Container |
Application: |
Microwave Amplifier, Antenna |
Polytype: |
6H-P |
Mohs Hardness: |
≈9.2 |
Density: |
3.0 G/cm3 |
Resistivity: |
≤0.1 Ω.cm |
Surface Orientation: |
On Axis 0° |
Roughness: |
Polish Ra≤1 Nm |
Packaging: |
Multi-wafer Cassette Or Single Wafer Container |
Application: |
Microwave Amplifier, Antenna |
6H-P type silicon carbide substrate is a semiconductor material grown by a special process. Its crystal structure is 6H type, indicating that its cells have hexagonal symmetry, and each cell contains a stacking sequence of six silicon atoms and six carbon atoms. P-type indicates that the substrate has been doped so that its conductivity is dominated by holes. An axis of 0° refers to the fact that the crystal orientation of the substrate is 0° in a specific direction (such as the C-axis of the crystal), which is usually related to the growth and processing of the crystal.
4 inch diameter Silicon Carbide (SiC) Substrate Specification
等级Grade |
精选级(Z 级) Zero MPD Production Grade (Z Grade) |
工业级(P 级) Standard Production Grade (P Grade) |
测试级(D 级) Dummy Grade (D Grade) |
||
直径 Diameter | 99.5 mm~100.0 mm | ||||
厚度 Thickness | 350 μm ± 25 μm | ||||
晶片方向 Wafer Orientation | Off axis: 2.0°-4.0°toward [1120] ± 0.5° for 4H/6H- |
||||
微管密度 ※ Micropipe Density | 0 cm-2 | ||||
电 阻 率 ※ Resistivity | p-type 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
n-type 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
主定位边方向 Primary Flat Orientation | 4H/6H-P |
- {1010} ± 5.0° |
|||
3C-N |
- {110} ± 5.0° |
||||
主定位边长度 Primary Flat Length | 32.5 mm ± 2.0 mm | ||||
次定位边长度 Secondary Flat Length | 18.0 mm ± 2.0 mm | ||||
次定位边方向 Secondary Flat Orientation | Silicon face up: 90° CW. from Prime flat ± 5.0° | ||||
边缘去除 Edge Exclusion | 3 mm | 6 mm | |||
局部厚度变化/总厚度变化/弯曲度/翘曲度 LTV/TTV/Bow /Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
表面粗糙度 ※ Roughness | Polish Ra≤1 nm | ||||
CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
边缘裂纹(强光灯观测) Edge Cracks By High Intensity Light | None | Cumulative length ≤ 10 mm, single length≤2 mm | |||
六方空洞(强光灯测) ※ Hex Plates By High Intensity Light | Cumulative area ≤0.05% | Cumulative area ≤0.1% | |||
多型(强光灯观测) ※ Polytype Areas By High Intensity Light | None | Cumulative area≤3% | |||
目测包裹物(日光灯观测) Visual Carbon Inclusions | Cumulative area ≤0.05% | Cumulative area ≤3% | |||
硅面划痕(强光灯观测) # Silicon Surface Scratches By High Intensity Light | None | Cumulative length≤1×wafer diameter | |||
崩边(强光灯观测) Edge Chips High By Intensity Light | None permitted ≥0.2mm width and depth | 5 allowed, ≤1 mm each | |||
硅面污染物(强光灯观测) Silicon Surface Contamination By High Intensity | None | ||||
包装 Packaging | Multi-wafer Cassette or Single Wafer Container |
Notes:
※Defects limits apply to entire wafer surface except for the edge exclusion area. # The scratches should be checked on Si face only.
1. Q: Compared with type 4H, what are the differences in performance between type 6H-P SIC substrate axis 0°?
A: 6H type silicon carbide compared to 4H type, the crystal structure is different, which may lead to differences in electrical properties, thermal properties and mechanical strength. The 6H-P type axis of 0° generally has more stable electrical properties and higher thermal conductivity, suitable for specific high-temperature, high-frequency applications.
2. Q: What is the difference between 4H and 6H SiC?
A: The main difference between 4H and 6H silicon carbide is their crystal structure, 4H is a tetragonal hexagonal mixed crystal, and 6H is a pure hexagonal crystal.
Tag: #Sic wafer, #silicon carbide substrate, #Sic 6H-P type, #on axis 0°, #Mohs Hardness 9.2