Sapphire applicator tubes are specialized components used in semiconductor plasma and process equipment where the tube may be exposed to microwave or RF energy, reactive process gases, elevated temperatures and plasma-generated species.

In remote plasma systems, process gas can pass through an applicator tube while microwave energy is coupled into the applicator region to generate reactive plasma species. Sapphire is particularly suitable for this type of application because of its combination of thermal stability, electrical insulation, chemical resistance and microwave/RF transmission characteristics.

Our sapphire applicator tubes can be supplied as individual tubes or as complete assemblies incorporating precision metal housings, threaded connectors, sealing interfaces and other customized mechanical components.

The product shown here combines a precision sapphire tube with a machined metal mounting structure and is intended for use as a replacement or customized component for semiconductor process equipment.

Key Features

High-Purity Sapphire Material

The applicator tube is manufactured from synthetic sapphire suitable for demanding semiconductor equipment environments.

Sapphire provides excellent resistance to high temperature, plasma exposure and chemically aggressive process conditions while maintaining high mechanical strength.

Suitable for Plasma Applications

Sapphire tubes are widely used in semiconductor processing applications including plasma applicator tubes, plasma containment tubes, process gas injector components and related plasma-generation systems.

Microwave and RF Compatible

Sapphire offers excellent dielectric characteristics and RF/microwave transmission capability, making it suitable for components positioned within microwave or remote plasma generation systems.

Precision Tube Manufacturing

Tube dimensions can be controlled according to customer requirements, including:

• Outer diameter
• Inner diameter
• Wall thickness
• Overall length
• End geometry
• Shoulder structure
• Groove design
• Surface finish
• Assembly interface

Sapphire + Metal Assembly

In addition to sapphire tube manufacturing, we can provide integrated assemblies incorporating machined metal components.

Available services may include:

• Precision metal housing
• External threads
• Internal mounting structures
• Mechanical sleeves
• Flanges
• Sealing interfaces
• Sapphire-to-metal assembly
• Replacement assembly manufacturing

Custom Replacement Parts

We support customized semiconductor equipment parts according to:

• Customer drawings
• Original samples
• Equipment dimensions
• Existing component specifications
• OEM reference numbers
• Reverse-engineering requirements

This makes the product suitable for semiconductor equipment maintenance, replacement and localization projects.

Typical Applications

Sapphire applicator tubes can be used in equipment and processes such as:

• Remote Plasma Source systems
• Plasma chamber cleaning
• Microwave plasma generation
• Semiconductor CVD equipment
• PECVD equipment
• HDP-CVD equipment
• Plasma etching equipment
• Dry etching systems
• Process gas delivery
• Plasma gas activation systems
• Semiconductor equipment replacement parts

Sapphire tubes are already used commercially for semiconductor plasma applicator, plasma containment and process gas injector applications.

Product Specifications

Note: Dimensions and assembly structures are produced according to the customer's equipment, drawing or existing sample.

Why Use Sapphire for Plasma Applicator Tubes?

The applicator tube is located in one of the more demanding areas of a plasma generation system.

Depending on equipment design, the tube may simultaneously encounter reactive gases, energetic plasma species, microwave energy and elevated temperatures.

Compared with conventional glass materials, sapphire provides a combination of:

• High temperature resistance
• High mechanical strength
• Excellent chemical stability
• Plasma resistance
• Good dielectric properties
• Microwave/RF transmission
• Long service potential in demanding process environments

For this reason, sapphire has become an important engineering material for plasma applicator tubes and other semiconductor process equipment components.

Custom Sapphire Applicator Tube Manufacturing

We manufacture sapphire components for semiconductor equipment with an emphasis on custom and replacement applications.

Instead of limiting customers to standard tube dimensions, we can manufacture parts according to actual process equipment requirements.

Customization options include:

Sapphire Tube

• OD and ID
• Tube length
• Wall thickness
• Tube ends
• Steps and shoulders
• Slots and grooves
• Surface roughness
• Polishing requirements

Metal Components

• Housing dimensions
• Thread specifications
• Mounting interfaces
• Flanges
• Sleeves
• Connector structures

Assembly

Sapphire tubes can also be supplied with corresponding metal components as an assembled semiconductor equipment part.

Replacement & Reverse Engineering Service

For discontinued, difficult-to-source or customized semiconductor equipment parts, customers can send us:

1. Original equipment part number
2. Technical drawing
3. Photos
4. Used or new sample
5. Critical dimensions
6. Equipment model
7. Application information

Our engineering team can evaluate the structure and manufacturing feasibility before quotation.

For parts manufactured as alternatives to existing equipment components, final compatibility should always be confirmed based on the customer's equipment configuration and technical specifications.

Quality Control

Depending on customer requirements, inspection can include:

• Dimensional inspection
• OD / ID inspection
• Wall thickness measurement
• Length inspection
• Surface inspection
• Thread inspection
• Assembly inspection
• Visual defect inspection
• Packaging inspection

Inspection reports can be provided according to project requirements.

What Information Should You Send for a Quote?

For faster quotation, please provide:

• Product drawing
• Sapphire tube OD
• Sapphire tube ID
• Tube length
• Wall thickness
• Surface finish
• Metal housing material
• Thread specifications
• Equipment brand/model
• OEM part number, if available
• Required quantity
• Application or process environment

If no drawing is available, please send clear photographs and a physical sample for evaluation.

FAQ

What is a sapphire applicator tube used for?

A sapphire applicator tube is commonly used in semiconductor plasma equipment, particularly in plasma generation, remote plasma cleaning and process gas activation systems.

Can you manufacture the complete applicator tube assembly?

Yes. In addition to sapphire tubes, customized metal housings, threaded components and mechanical assemblies can be manufactured according to drawings or samples.

Can you manufacture replacements for existing semiconductor equipment parts?

Yes. We support drawing-based and sample-based manufacturing for semiconductor equipment replacement components. Customers can provide the OEM reference number, drawing, sample and equipment information for evaluation.

Can the sapphire tube dimensions be customized?

Yes. Outer diameter, inner diameter, length, wall thickness, tube-end geometry and surface finish can all be customized.

Do you offer small quantities?

Prototype, maintenance and small-batch semiconductor equipment projects can be evaluated according to the required dimensions and manufacturing difficulty.