Laser microjet cutting (LMJ) equipment
The Microjet Laser system uses the guiding and cooling effects of the liquid jet to couple the high-energy pulsed laser to the micron-scale liquid jet (usually deionized water or inert liquid), enabling ultra-precision machining of semiconductor materials.
Microjet laser technology, with its high precision, low damage and high cleanliness, is replacing traditional machining and dry laser processes in the semiconductor field, especially in third-generation semiconductors (SiC/GaN), 3D packaging and ultra-thin wafer processing.
Laser microjet cutting (LMJ) equipment
Wafer dicing