Wafer Thinning Equipment
This equipment enables precision thinning of 4"-12" brittle semiconductor materials including silicon (Si), silicon carbide (SiC), gallium arsenide (GaAs), and sapphire substrates, achieving thickness control accuracy of ±1 μm and total thickness variation (TTV) ≤2 μm to meet the stringent requirements of advanced packaging and power device fabrication.
Wafer Thinning System
Precision Thinning Equipment
Wafer Thinning Equipment
SiC wafer
Si wafer
Sapphire wafer