The 1-inch wafer cassette is a specialized container designed for storing, transporting, and automated handling of 1-inch (25.4mm) wafers in semiconductor manufacturing, optoelectronic devices, and microelectronics R&D. Manufactured from high-purity polymers (such as PEEK or PVDF) or antistatic materials, it ensures wafer protection against contamination, electrostatic damage, and physical impact in cleanroom environments. Compliant with SEMI standards, the cassette is suitable for automated wafer transfer systems in processes including MOCVD, PECVD, lithography, and etching.
Brief: Discover the 1 Inch Single Wafer Cassette, designed for ESD-safe storage of 1-inch wafers in semiconductor and optoelectronic applications. Made from high-purity polymers, it ensures protection against contamination and electrostatic damage, perfect for cleanroom environments and automated handling systems.
Related Product Features:
Ultra-clean performance with Class 100 cleanroom certification and ultra-low particle generation.
ESD protection with carbon fiber reinforcement or antistatic coating (10⁶-10⁹Ω/sq).
High temperature resistance up to 150°C and chemical resistance against acids and solvents.
Automation-compatible with standardized interfaces for robotic handling (SMIF/FOUP).
Precision wafer protection with slot pitch accuracy of ±0.1mm and positioning error ≤0.05mm.
Suitable for semiconductor manufacturing, optoelectronics, MEMS fabrication, and R&D applications.
Compliant with SEMI standards for secure transportation and automated wafer transfer systems.
Optional RFID tag slots for enhanced wafer traceability in advanced packaging processes.
Faqs:
What is the primary use of the 1-inch wafer cassette?
It is used for handling and storing 1-inch semiconductor wafers in research labs and small-scale production of optoelectronic devices.
What materials are used in the 1-inch wafer cassette?
The cassette is typically made of high-purity polymers like PEEK or PVDF with anti-static properties for cleanroom compatibility.
Is the 1-inch wafer cassette compatible with automated systems?
Yes, it features standardized interfaces (SMIF/FOUP compatible) for seamless integration with robotic handling systems.